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MSP Corporation Particle Coating Service

Accurately apply particles for inspection device evaluation.

MSP Corporation is a company that provides high-precision particle coating technology for the semiconductor and device fields. Centered around its patented DMA classification technology, it offers particle coating equipment and coating services that can control particle size and the number of coatings with high reproducibility. Regarding particle coating services, a range of service menus is available according to applications, including coating for evaluation and verification wafers, coating for photomasks, PRE coating for cleaning equipment evaluation, and SPx coating wafers for surface inspection equipment calibration. These coatings are performed using NIST-traceable standard particles, and accompanying materials such as scan results and coating reports can also be provided.

  • MSP塗布サービス2.jpg
  • Semiconductor inspection/test equipment
  • Particle coating device

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